ESPion: Advanced Langmuir Probe for Plasma Diagnostics

The Hiden ESPion probe can be used for regular monitoring of I-V plasma characteristic, which provides direct data relating to plasma reproducibility and stability.

Automatic real-time extrapolation of plasma parameters provides comprehensive data on plasma properties, which can then be used in characterisation and uniformity monitoring.

The standard plasma analysis models of the ESPion system are the orbital motion limited (OML) and Allen Boyd Reynolds (ABR).

Spatially resolved measurements are enabled across the plasma volume by the Hiden automatic Z-drive. The standard Z-drive translation options are: 300, 600 and 900mm.

Key Features

The main features of the ESPion are listed below:

15 scans/sec acquisition rate with D-O-E interface for auto, semi or manual analyses

4.25MOhm at 13.56 MHz cf. 100kOhm

Gas cooled multi-inductor chain for high temperature plasma operation

Gas cooled multi-inductor chain can be replaced by the user for tuning to other frequencies

Reference probe compensates for low frequency effects e.g. shift in the plasma potential (e.g. anodised chamber walls) or noise (e.g. power supply)

Highest blocking impedance of any commercially available unit

Fastest pulsed plasma specifications of any commercial probe

Contains all necessary gating circuitry as standard

Interlocked isolation valve, 90° probes, combined linear – rotary drives options available

Self-cleaning cycle to limit probe tip contamination

300, 600 or 915mm auto linear drive options

ESPsoft control via RS232, RS485 or Ethernet LAN

Applications

The main applications of the ESPion are listed below:

Floating potential

Electron temperature

Ion flux

Ion density

Plasma potential

Plasma characterisation

Electron energy distribution