EQS: System for Analysis of Secondary Positive and Negative Ions from Solid Samples from Hiden Analytical

The Hiden EQS is a high transmission quadrupole secondary ion mass spectrometry, SIMS, detector including a 45° electrostatic sector for simultaneous ion energy analysis.

It is basically a system for testing secondary positive and negative ions from solid samples. Ions are collected on the axis of the device. This feature makes it ideal for fitting as an after-market detector to a range of surface analysis instrumentation.

Additionally the standard EQS can also be used to monitor the residual gas with the help of an in-built electron impact ionizer. This can be used for detection of sputtered neutrals.

Key Features

The main features of the EQS are:

High sensitivity pulse ion counting detector with seven decade dynamic range

Raster control for improved depth profiling and imaging with integrated signal gating

Triple filter quadrupole, mass options to 2500amu

45° electrostatic sector analyser, scan energy at 0.05eV increments/ 0.25eV FWHM

Differentially pumped option for use in high pressure environments

Penning gauge and interlocks to provide over pressure protection

Minimal perturbation of ion flight path and constant ion transmission at all energies

MASsoft control via RS485, RS232 or Ethernet LAN

Can be easily interfaced to currently available systems

Applications

The main applications of the EQS are listed below:

Catalysis

Surface analysis

Surface science

Thin film and surface engineering