Entegris

Entegris is a leader in specialty chemicals and advanced materials solutions for the microelectronics industry. In 2018, Entegris acquired Particle Sizing Systems, a company focused on particle sizing instrumentation for liquid applications in both semiconductor and life science industries.

With the technology from PSS, Entegris is enabling customers with the ability to perform particle size analysis online and in real time, directly in the fluid stream process. Automating the monitoring process can lead to the application of more effective solutions, like proper filter selection and system maintenance. This ability to intervene with these solutions prevents costly yield excursions. From wet to dry, online to research laboratory - we have engineered a complete family of modular instruments that can be configured to meet the specific demands of an application.

Single Particle Optical Sizing (SPOS)

The Entegris AccuSizer operates using the principle of single particle optical sizing (SPOS). This technique generates high accuracy, high resolution particle size distribution results as well as concentration data in particles/mL. The AccuSizer platform includes multiple configurations designed to meet a wide array of applications including laboratory and online systems. Multiple sensor options cover a wide range of particle size and concentration limits. Advanced fluidics modules can handle low concentration samples requiring no dilution to highly concentrated inks and CMP slurries using our patented two stage exponential dilution system.

Dynamic Light Scattering

The Nicomp dynamic light scattering (DLS) system measures particle size below 1 nm and zeta potential to study particle charge. The unique Nicomp algorithm provides the highest resolution results for samples containing more than one peak. Other unique capabilities include auto-dilution and auto-samplers to facilitate high sample throughput.