Energetiq Technology

Energetiq is a developer and manufacturer of advanced short wavelength light sources that enable nano-scale structures and products. Used in complex scientific and engineering applications, Energetiq's light products are based on new technology that generates high brightness and high power light in the 1nm to 400nm range with high reliability in a compact package.

Energetiq's light sources are used for: DUV cleaning and photoprocessing; EUV lithography, metrology and photoresist development; soft x-ray microscopy; and a variety of applications where synchrotron radiation has traditionally been used.