Electrostatic Charge Removal with a VUV (Vacuum Ultraviolet) Ionizer - L12542VUV

Hamamatsu have developed an electrostatic charge remover called L12542, which uses vacuum ultraviolet (VUV) light. The L12542 has a wide irradiation angle, 3 times bigger than the present VUV light source, which helps it to effectively eliminates electrostatic charges across wide areas in vacuum or depressurized environments.

Until now, due to the restricted irradiation angle of the VUV light source, more than one VUV light source was needed to neutralize the electrostatic charges in large areas. This issue is solved by the L12542 VUV ionizer, which efficiently neutralizes large areas in a vacuum.

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Key Features

No air flow is required

No electromagnetic noise and dust emissions

Long life

Highly efficient ion generation in a vacuum

No overshoot (does not create opposite-polarity static charges)

Large irradiation (neutralizing) area

Applications

Hard disk manufacturing equipment

LCD manufacturing equipment

Dechucking of electrostatic chucks

Organic EL manufacturing equipment

Semiconductor manufacturing equipment (vacuum process)

Film manufacturing equipment