Electromagnet-based Cryogenic Probe Station – Lake Shore Model EMPX-HF

The Model EMPX-HF is a versatile cryogenic electromagnet-based micro-manipulated probe station used for nondestructive testing of devices on full and partial wafers up to 25 mm (1 in) in diameter. The EMPX-HF is a platform for measurement of magneto-transport, electrical, electrooptical, parametric, high Z, DC, RF, and microwave properties of materials and test devices. Nanoscale electronics, quantum wires and dots, semiconductors, superconductors, and spintronic devices are typical materials measured in an EMPX-HF. A wide selection of probes, cables, sample holders, and options makes it possible to configure the EMPX-HF to meet your specific measurement applications.

Mounted on a vibration isolation table, the EMPX-HF is equipped with a 5.5 kOe (0.55 T) horizontal (in-plane) field electromagnet. The EMPX-HF operates over a temperature range of 4.5 K to 400 K. With options, the base temperature can be extended down to 3.2 K. The probe station provides efficient temperature operation and control with a continuous refrigeration system using either liquid helium or liquid nitrogen. Field dependent measurements at ambient temperature are possible without the use of cryogens. Liquid helium is only required for cooling the device under test (DUT) to below 80 K. Vapor-cooled shielding optimizes efficiency and intercepts blackbody radiation before it reaches the sample. A heater on the sample stage along with independent control of radiation shield heaters provides the probe station with fast thermal response.

The EMPX-HF is user configured with up to four ultra-stable micro-manipulated stages, each providing precise 3-axis control of the probe position to accurately land the probe tip on device features. The 360° sample stage rotation option allows you to measure angular-dependent and anisotropic magneto-transport properties of the DUT. Proprietary probe tips in a variety of sizes and materials minimize thermal mass and optimize electrical contacts to the DUT. Probe tips are thermally linked to the sample stage to minimize heat transfer to the DUT.

For increased versatility, EMPX-HF options include a 3.2 K base temperature stage, 360° sample stage rotation, LN2 Dewar kit, higher magnification microscope, vacuum turbo pumping system, pump-line vibration isolator, recirculating chillers, and fiber optic probe arm modification.

Features of Model EMPX-HF Probe Station:

5.5 kOe (0.55 T) horizontal (in-plane) field electromagnet

360° sample stage rotation option

High stability operation from 3.2 K to 400 K

Measurements from DC to 67 GHz

Accommodates up to 25 mm (1 in) diameter wafers

Configurable with up to four thermally anchored micro-manipulated probe arms

Probe arms with 3-axis adjustments and ±5° theta planarization

Cables, shields, and guards minimize electrical noise and thermal radiation losses

Options and accessories for customization to specific research needs