Discover the Atomry Thermal ALD/ALE

Okyay Tech’s Atomry Thermal ALD/ALE can be customized to fit any laboratory or situation.

Image Credit: OkyayTech

Specifications

Reactor chamber made of stainless steel

MKS MFC-controlled carrier gas

250 ºC substrate heating (320 ºC optional)

Varying substrate sizes: 100 mm, 200 mm, and 300 mm

MKS pneumatic isolation valve

Swagelok high-speed ALD valves (4–8 ports)

Convection improved Pirani vacuum gauge

World-class scientific support team and recipe library

Completely automated with recipe control

User-friendly graphical user interface

Customizations

Powder ALD kit with rotating canister, conformal coating of granular substrates

Glovebox integration

Ozone (O₃) process kit, completely recipe-integrated and computer regulated

Precursor cooling

Low Vapor Pressure Chemical Delivery Upgrade

In-situ QCM thickness monitor

In-situ ellipsometer metrology upgrade

Dome-lid for 3D objects and non-standard substrates

Customized vacuum ports for in-situ RGA and IR spectroscopy

Gradian Powder ALD

3D Conformal Coatings

Gradian is a laboratory-scale ALD tool that works with powder substrates. Gradian coats free-flowing granular samples uniformly and conformally. Powder batches of 1 g to 10 g are typical for the research-scale efforts.

Image Credit: Okyaytech Ald