ZeGage™ Pro: 3D Optical Profiler System
To ensure quality control and process monitoring in an industrial environment, ZeGage™ Pro ……...
Discover the Atomry Thermal ALD/ALE
Okyay Tech’s Atomry Thermal ALD/ALE can be customized to fit any laboratory or situation.
Image Credit: OkyayTech
Specifications
Reactor chamber made of stainless steel
MKS MFC-controlled carrier gas
250 ºC substrate heating (320 ºC optional)
Varying substrate sizes: 100 mm, 200 mm, and 300 mm
MKS pneumatic isolation valve
Swagelok high-speed ALD valves (4–8 ports)
Convection improved Pirani vacuum gauge
World-class scientific support team and recipe library
Completely automated with recipe control
User-friendly graphical user interface
Customizations
Powder ALD kit with rotating canister, conformal coating of granular substrates
Glovebox integration
Ozone (O3) process kit, completely recipe-integrated and computer regulated
Precursor cooling
Low Vapor Pressure Chemical Delivery Upgrade
In-situ QCM thickness monitor
In-situ ellipsometer metrology upgrade
Dome-lid for 3D objects and non-standard substrates
Customized vacuum ports for in-situ RGA and IR spectroscopy
Gradian Powder ALD
3D Conformal Coatings
Gradian is a laboratory-scale ALD tool that works with powder substrates. Gradian coats free-flowing granular samples uniformly and conformally. Powder batches of 1 g to 10 g are typical for the research-scale efforts.
Image Credit: Okyaytech Ald
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