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DiamoTek 700 Series Microwave Diamond CVD System from Lambda Technologies
The DiamoTek 700 Series Microwave Diamond CVD systems incorporatr tunable resonant cavity technology offering proven diamond deposition capability with high efficiency and control.
Key Features
Precise plasma control
Efficient energy coupling
Flexible processing options
Provent scale up performance
Uniform deposition & high rates
Fully integrated systems
Process development services
Clean room compatible
Integrated Systems for R&D and Production
Computer controlled with auto cycle profiling and integrated microwave, gas handling & vacuum modules
Remote position control of cavity tuning & substrate
Power option from 1.2 kW to 10kW 2.45 GHz
Process parameters from 20 to 00 Torr
Complete range of process gases
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