DiamoTek 700 Series Microwave Diamond CVD System from Lambda Technologies

上海仪舶实验室自动化 25-01-23 17:25:05

DiamoTek 700 Series Microwave Diamond CVD System from Lambda Technologies

The DiamoTek 700 Series Microwave Diamond CVD systems incorporatr tunable resonant cavity technology offering proven diamond deposition capability with high efficiency and control.

Key Features

Precise plasma control

Efficient energy coupling

Flexible processing options

Provent scale up performance

Uniform deposition & high rates

Fully integrated systems

Process development services

Clean room compatible

Integrated Systems for R&D and Production

Computer controlled with auto cycle profiling and integrated microwave, gas handling & vacuum modules

Remote position control of cavity tuning & substrate

Power option from 1.2 kW to 10kW 2.45 GHz

Process parameters from 20 to 00 Torr

Complete range of process gases

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