Deep Level Transient Spectroscopy

The DLS is designed for interfacing to a wide range of cryostats.

Full Range of Measurement Modes

Temperature scan

Depth profiling

Frequency scan

Capture cross-section measurement

Conductance transient measurements

C-V characterization

Optical injection

Optional analog or digital control of settings to allow real user-friendly operation

Full computer control with wide-ranging software support, full library database for accurate contamination identification

Sample quality test by I-V, C-V

DLS-1100

The DLS-1100 is an enhanced, high-sensitivity system. Compared to its predecessor, the DLS-83D, it is eight times more sensitive.

The system provides a fully automatic measurement mode, as well as a full interpretation of the measured data, including impurity identification and concentration determination without any need for user interaction.

The Deep Level Transient Spectroscopy (DLTS) is the finest method for monitoring and characterizing deep levels caused by deliberately or accidentally introduced impurities and defects in semiconductor materials and whole devices.

Features and System Specifications

Maximum sensitivity for detection of trace levels of contamination

Interfacing to a wide range of cryostats

Broad range of measurement modes:

temperature scan

depth profiling

frequency scan

optical injection

C-V characterization

capture cross-section measurement

conductance transient measurements

Controlled by analog and digital settings to allow operational ease

Sample quality test by I-V, C-V

Complete computer control with wide-ranging software support, full library database for accurate contamination identification