Cryogen Cooled, Low-Vibration Probe Stations

The ST-500 series probe stations from Janis are high-performance research tools manufactured to provide cost-effective vacuum and cryogenic probing of wafers and systems.

The well-established ST-500 cryostat forms the base for these probe stations, and includes low vibration technology to provide exceptional sample positional stability. Researchers rely on these systems to perform research in numerous fields such as ferroelectrics, MEMS, superconductivity, nanoscale electronics, optics, and material sciences.

Key Features

The main features of the ST-500 probe stations are:

Temperature range from ~3.5K to 475K (optional: 8K-650K) (based on probes used)

Low vibration level and positional drift

Can work with either liquid helium or liquid nitrogen

Helium consumption less than 1liter/hour

Up to seven cooled, easily interchangeable, micro-manipulated probe arms

Can hold up to 2” (51mm) diameter wafers (optional: up to 8” [203mm])

Electrical measurements from DC-67GHz

Broad range of economical LF probe tips that are easy to substitute

Extremely low triaxial probe arms leakage current of just a few fA

Multi-tip probes

Non-destructive, non-contact Kelvin probes

System customization options

Smooth X-Y-Z- travel stages for all monoscope unit assemblies

Fiber probe arms with single and multi-mode fiber options

Optional optical access via the sample mount for transmission measurements

Supplementary electrical feedthroughs with wires and cables to sample area

Optional special tiny vacuum chamber to transfer sample under vacuum from glove box to probe station

Optional movable chuck.

Janis Research Cryogenic ApplicationsPlay