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Coolant Control Module for Plasma Cleaning
The Coolant Control Module is a closed-loop water circulation system that regulates plasma source temperature throughoutplasma cleaning and actively cools the plasma source to enhance plasma stability and protectsubstrates from thermal damage.
AFC-CCM features include:
Temperature monitoring and control in real-time
Ethernet output of set point and process temperature (through the AtomfloTMcontroller)
Integration with the AtomfloTMcontroller for automated temperature regulation
Cooling and heating capabilities
Facilities and Dimensions
Source: Surfx Technologies, LLC
| Specifications | |
|---|---|
| Power supply | 200 – 240 VAC, 8 A, 50/60 Hz |
| Coolant | Distilled water (~1.0 L) |
| Typical operating temperature | 60 °C |
| Dimensions (W*D*H) | 437 x 650 x 143 mm (17.2 x 25.6 x 5.6 inches) |
| Weight | 11.3 kg (28 lbs) |
Image Credit: Surfx Technologies, LLC
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