Coolant Control Module for Plasma Cleaning

上海仪舶实验室自动化 25-01-23 13:35:15

Coolant Control Module for Plasma Cleaning

The Coolant Control Module is a closed-loop water circulation system that regulates plasma source temperature throughoutplasma cleaning and actively cools the plasma source to enhance plasma stability and protectsubstrates from thermal damage.

AFC-CCM features include:

Temperature monitoring and control in real-time

Ethernet output of set point and process temperature (through the AtomfloTMcontroller)

Integration with the AtomfloTMcontroller for automated temperature regulation

Cooling and heating capabilities

Facilities and Dimensions

Source: Surfx Technologies, LLC

Specifications
Power supply 200 – 240 VAC, 8 A, 50/60 Hz
Coolant Distilled water (~1.0 L)
Typical operating temperature 60 °C
Dimensions (W*D*H) 437 x 650 x 143 mm (17.2 x 25.6 x 5.6 inches)
Weight 11.3 kg (28 lbs)

Coolant Control Module for Plasma Cleaning

Image Credit: Surfx Technologies, LLC

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