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Atomflo™ 600: Advanced Controller for Argon Plasma Systems
The AtomfloTM600 controller serves as the central unit of the argon plasma system. It features a 600 W radio frequency (RF) power supply, an auto-tuning matching network, three mass flow controllers to regulate argon, and two process gases, including hydrogen, oxygen, or nitrogen.
The controller also includes a computer running Windows 10 and operated through an eight-inch touch screen. LabVIEW software offers users a robust interface for selecting recipes, adjusting control modes, and monitoring process conditions.
The controller's features include:
Unlimited capacity for storing process recipes
Real-time management of argon and process gas flow rates,plasma source temperature, and RF power
Auto-tuning of forward and reflected power through phase and magnitude detection
Warnings and alarms for processes outside specifications
Real-time graph display of process parameters
Remote control and data logging capabilities via Ethernet
Image Credit: Surfx Technologies, LLC
AF-600 Specifications
Dimensions (W × D × H)
440 × 640 × 230 mm
17.3 × 25.1 × 9.1 inches
RF Power
Maximum 600 W
At 27.12 MHz
Patented Plasma Technology
O2, H2, N2 reactive gas chemistry
Atmospheric argon plasma
RF capacitive discharge
AFC-600
The AtomfloTM600 controller is engineered to give customerscomprehensive process traceability andfull control over atmospheric pressure plasma.
Gas Facilities
Source: Surfx Technologies, LLC
| Plasma gases* (choose one) | ||||
|---|---|---|---|---|
| Type | Inlet Fitting** | Regulator | Max Flow (LPM) | Operating Pressure |
| Argon (Ar) | 3/8-inch OD | CGA 580 | 40 | 0.35-0.7 MPa (50-100 psig) |
| Helium (He) | 3/8-inch OD | CGA 580 | 60 | 0.35-0.7 MPa (50-100 psig) |
| Process gases* (choose two) | ||||
| Type | Inlet Fitting** | Regulator | Max Flow (LPM) | Supply Gas Pressure |
| Oxygen (O2) | 1/4-inch OD | CGA 540 | 0.60 | 0.35-0.7 MPa (50-100 psig) |
| Nitrogen (N2) | 1/4-inch OD | CGA 580 | 0.60 | 0.35-0.7 MPa (50-100 psig) |
| 5.0 % H2 in argon | 1/4-inch OD | CGA 580 | 10.0 | 0.35-0.7 MPa (50-100 psig) |
*Gas purity should be at least 99.99 % (industrial grade).**Swagelok bulkhead connector.
Facilities
Source: Surfx Technologies, LLC
| Specifications | |
|---|---|
| Power supply | 200 – 240 VAC, 8 A, 50/60 Hz |
| Air supply (CDA) | None |
| Dimensions (W*D*H) | 437 x 650 x 232 mm (17.2 x 25.6 x 9.1 inches) |
| Weight | 29 kg (64 lbs) |
Image Credit: Surfx Technologies, LLC
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