Atomflo™ 600: Advanced Controller for Argon Plasma Systems

The Atomflo^TM600 controller serves as the central unit of the argon plasma system. It features a 600 W radio frequency (RF) power supply, an auto-tuning matching network, three mass flow controllers to regulate argon, and two process gases, including hydrogen, oxygen, or nitrogen.

The controller also includes a computer running Windows 10 and operated through an eight-inch touch screen. LabVIEW software offers users a robust interface for selecting recipes, adjusting control modes, and monitoring process conditions.

The controller's features include:

Unlimited capacity for storing process recipes

Real-time management of argon and process gas flow rates,plasma source temperature, and RF power

Auto-tuning of forward and reflected power through phase and magnitude detection

Warnings and alarms for processes outside specifications

Real-time graph display of process parameters

Remote control and data logging capabilities via Ethernet

Image Credit: Surfx Technologies, LLC

AF-600 Specifications

Dimensions (W × D × H)

440 × 640 × 230 mm

17.3 × 25.1 × 9.1 inches

RF Power

Maximum 600 W

At 27.12 MHz

Patented Plasma Technology

O₂, H₂, N₂ reactive gas chemistry

Atmospheric argon plasma

RF capacitive discharge

AFC-600

The Atomflo^TM600 controller is engineered to give customerscomprehensive process traceability andfull control over atmospheric pressure plasma.

Gas Facilities

Source: Surfx Technologies, LLC

*Gas purity should be at least 99.99 % (industrial grade).**Swagelok bulkhead connector.

Facilities

Source: Surfx Technologies, LLC

Image Credit: Surfx Technologies, LLC