Atomflo™ 600: Advanced Controller for Argon Plasma Systems

上海仪舶实验室自动化 25-01-23 13:58:58

Atomflo™ 600: Advanced Controller for Argon Plasma Systems

The AtomfloTM600 controller serves as the central unit of the argon plasma system. It features a 600 W radio frequency (RF) power supply, an auto-tuning matching network, three mass flow controllers to regulate argon, and two process gases, including hydrogen, oxygen, or nitrogen.

The controller also includes a computer running Windows 10 and operated through an eight-inch touch screen. LabVIEW software offers users a robust interface for selecting recipes, adjusting control modes, and monitoring process conditions.

The controller's features include:

Unlimited capacity for storing process recipes

Real-time management of argon and process gas flow rates,plasma source temperature, and RF power

Auto-tuning of forward and reflected power through phase and magnitude detection

Warnings and alarms for processes outside specifications

Real-time graph display of process parameters

Remote control and data logging capabilities via Ethernet

Atomflo™ 600: Advanced Controller for Argon Plasma Systems

Image Credit: Surfx Technologies, LLC

AF-600 Specifications

Dimensions (W × D × H)

440 × 640 × 230 mm

17.3 × 25.1 × 9.1 inches

RF Power

Maximum 600 W

At 27.12 MHz

Patented Plasma Technology

O2, H2, N2 reactive gas chemistry

Atmospheric argon plasma

RF capacitive discharge

AFC-600

The AtomfloTM600 controller is engineered to give customerscomprehensive process traceability andfull control over atmospheric pressure plasma.

Gas Facilities

Source: Surfx Technologies, LLC

Plasma gases* (choose one)
Type Inlet Fitting** Regulator Max Flow (LPM) Operating Pressure
Argon (Ar) 3/8-inch OD CGA 580 40 0.35-0.7 MPa (50-100 psig)
Helium (He) 3/8-inch OD CGA 580 60 0.35-0.7 MPa (50-100 psig)
Process gases* (choose two)
Type Inlet Fitting** Regulator Max Flow (LPM) Supply Gas Pressure
Oxygen (O2) 1/4-inch OD CGA 540 0.60 0.35-0.7 MPa (50-100 psig)
Nitrogen (N2) 1/4-inch OD CGA 580 0.60 0.35-0.7 MPa (50-100 psig)
5.0 % H2 in argon 1/4-inch OD CGA 580 10.0 0.35-0.7 MPa (50-100 psig)

*Gas purity should be at least 99.99 % (industrial grade).**Swagelok bulkhead connector.

Facilities

Source: Surfx Technologies, LLC

Specifications
Power supply 200 – 240 VAC, 8 A, 50/60 Hz
Air supply (CDA) None
Dimensions (W*D*H) 437 x 650 x 232 mm (17.2 x 25.6 x 9.1 inches)
Weight 29 kg (64 lbs)

Atomflo™ 600: Advanced Controller for Argon Plasma Systems

Image Credit: Surfx Technologies, LLC

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