MX61 Series Semiconductor Inspection Microscope from Evident
Evident' MX61 semiconductor inspection microscope offers excellent clarity and image resolut……...

Prevac offers Ambient Pressure XPS (ESCA) system, a new dedicated system developed for ambient pressure 1mbar – 10-10 mbar XPS (ESCA)/UPS experiments with controllable sample temperature ranging from 100K to 850K in analysis chamber.
The Ambient Pressure XPS (ESCA) system comes with full PLC protection and software control including data acquisition and control of all integrated devices, supplies and supplementary equipment. The systems also features a sample park chamber, which allows storage of up to 5 sample holders, and a gas dosing system with heating and thermal stabilisation ability.
Key Features
The main features of the Ambient Pressure XPS (ESCA) System are:
Ambient pressure chamber 1mbar – 10-10 mbar
Fitted with VG Scienta R3000 HP analyser
Differentially pumped UV source
Differentially pumped double anode X-ray source
Differentially pumped X-ray monochromator
Four pumping stages for main chamber and analyser
Laser and resistive heating of sample holder
Integral halogen bakeout of analytical chamber
Sample preparation chamber
Wide range of sample temperature (100K - 2200K)
High pressure reactor - up to 20 bar, 650°C
Intro with preliminary heating
TDS sample measurement during XPS (ESCA)/UPS in ambient pressure
Evident' MX61 semiconductor inspection microscope offers excellent clarity and image resolut……...
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