AJA International, Inc.

上海仪舶实验室自动化 25-02-05 11:30:41

AJA International, Inc.

AJA International, Inc. (est. 1989) began as a supplier of innovative thin film, vacuum and microwave products. In 1991 the company introduced the first commercial, con-focal, sputter tool with a rotating substrate and magnetron heads which could be tilted without breaking vacuum. This innovation yielded extremely uniform depositions of single layers, multi-layers and alloys and has become the benchmark by which other R&D sputtering systems are measured - the ATC Series Sputtering System.

AJA International, Inc. has continued to develop many highly successful physical vapor deposition (PVD) tools including the compact ATC ORION Series Sputtering Systems, ATC-E and ATC ORION-E Evaporation Systems, the popular Stiletto Series HV sputter sources, SHQ Series substrate holders with heating, RF biasing, LN2 cooling, indexing, rotation and planetary motion, PHASE II Labview based, "plug and play" computer control systems, the STXL Series of large circular and rectangular magnetrons with modular magnet arrays, the Nautilus Series rotating “modular” magnetrons, automated combinatorial deposition systems, various ATC-B batch coating systems, a UHV downstream microwave oxygen plasma source, and a patented conical target magnetron which is ideal for three dimensional coatings and OLED applications.

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