AirSentry II AMC Monitoring Ion Mobility Spectrometers

The AirSentry^® II series of ion mobility spectrometersidentify and alert operatorsto minute concentrations or variations in the levels of ammonia-containing species, acids, amines, and chlorides in the air. These point-of-use sensors have a sensitivity of parts per trillion (ppt), allowing for rapid reaction times, enhanced detection selectivity, and repeatable performance.

The combination of Air Sentry II sensors and a centralized software platform enables simple data collection and processing. The AirSentry II sensor series provides continuous actionable data, allowing for quick reaction to contamination sources and occurrences.

Benefits

Constant AMC monitoring of critical locations

Robust and reliabledata collection, control, and evaluation

Long-term data stability

Lowest cost-per-test

Features

High-sensitivity identification of bases and acids, including ammonia, chlorides, and amines

Adaptable product set up for mobile, multi-point, and point-of-use monitoring uses

Compact size allows placement in any location

Ethernet, RS-232, 4-20 mA outputs

Applications

Real-time monitoring of corrosioninetch process regions

Monitoring of ammonia and amine in real-time within critical lithography systems

Quantification of chemical filter efficiency

Monitoring and troubleshooting contamination sources throughoutin-process and cleanroom instruments

Contamination analysis withinFOUP wafer storage modules

Specifications

Source: Particle Measuring Systems