Airborne Molecular Contaminations (AMC) Monitoring for Semiconductor Applications

The AMC-Monitor is a modular and flexible platform designed for monitoring Airborne Molecular Contaminations (AMC) in semiconductor applications, including:

The FOUP analysis focuses on VOCs and condensables,and includes complete integration with the Pfeiffer Vacuum APA 302 pod analyzer.

Clean-room monitoring in fabrication plants: Automated detection of AMC at the tool level as well as directly in the fab at variable locations and multiple sampling points with an integrated multiplexing system.Optionally fully integrated aboard the Pfeiffer Vacuum AMPC fab analyzer.

Automation of fence lines, including alarm levels and upstream and downstream filter testing, is used to monitor the outside environment and intake air.

The custom-made analyzer is based on the Automated Measurement and Evaluation (AME) software suite, which includes pre-set recipes for monitoring challenges and the most appropriate IONICON PTR-TOFMS series instrument for the specific application. The scalable multiplexing solution reduces the analysis costs per sampling point.

Below are the advantages that come exclusively with a time-of-flight (TOF) based analyzer:

Incredible speed

Enhanced separation for complex samples

High sensitivity

The IONICON AMC-Monitor is ideal for addressing present and upcoming difficulties in the semiconductor sector.

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AMC-Monitor T-1000 Features and Benefits

Loaded with:

On-board multiplexing (multiple sampling lines) and calibration

On-line LOD (limit of detection) <1 pptv

Several soft chemical ionization modes – wide component range

Response time below 100 ms

Full mass spectral analysis in a split second

Renowned PTR-MS and SRI-MS technology

AME monitoring solution software

Enhanced separation, identification, and quantification capabilities

Benefits:

Data reporting and remote control

Real-time simultaneous quantification of hundreds of substances

Suitable for upcoming improvements and updates

Expert recipes that have been pre-programmed for the analysis of the target species

Basic graphical user interface

Filter testing, supply air monitoring, fence-line and clean-room AMC monitoring, and FOUP contamination detection combined with a Pfeiffer Vacuum APA 302 pod analyzer

Modbus TCP industrial integration

AMC-Monitoring Applications

FOUP Monitoring

VOC and condensables are the main topics of analyzing AMC contamination in FOUP. Complete compatibility with the Pfeiffer Vacuum APA 302 pod analyzer is offered.

Typical relevant substances:

PGME

Acetone

CNF/PFTBA

IPA

Toluene

COF

MEK

Fab Clean-Room Monitoring

Automated AMC monitoring at several sampling locations. Complete compatibility with Pfeiffer Vacuum AMPC systems is offered.

Typical relevant substances:

Perfluoro-carbons

Trimethylsilanol, HMDSO

PGMEA, PGME

Chloro-carbons

Siloxanes

Acetic Acid

Ethyl Acetate, Ethyl Lactate

BTEX

Monitoring of Outside Air

Automatic fence line surveillance, including alarm settings.

Typical relevant substances:

Organic acids (e.g. acetic acid, formic acid)

Aldehydes, Ketones, Glycolic compounds

Pyrolysis Products from biomass burn

VOC and Condensables (sticky compounds)

Sulfur Compounds

H₂S

Mercaptans

Thioethers

Nitrogen-Containing Compounds

Acetonitrile (biomass burning)

NH₃

Amines

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Stand-alone version of the AMC-Monitor, optimized for end-users.Image Credit: IONICON Analytik

OEM versions of the AMC-Monitor, optimized for system integrators.Image Credit: IONICON Analytik

Automated Measurement and Evaluation (AME) software.Image Credit: IONICON Analytik

UPM 2021 - Jens Herbig, IONICON AnalytikPlay

Video Credit: IONICON Analytik

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