AccuSizer Mini Systems for In-Process Suspension Monitoring

TheAccuSizer Mini system features a modular design, enabling users to tailor sensors and fluidics options to match the characteristics of customer slurries and process equipment. The systems deliver rapid and high-resolution results with count rates surpassing those of alternative technologies, ensuring superior accuracy.

This enhancement in statistics is crucial for detecting large particle counts (LPC) that may otherwise impact yields or product quality.

An array of customized autodilution modules ensures precise concentration delivery to the sensor for accurate measurements.

Utilizing the single particle optical sizing (SPOS) technique, a selection of sensors operating within focused size ranges and concentration limits yields the utmost accuracy in results.

Employ this system for ongoing monitoring of LPCin the Chemical Mechanical Planarization (CMP) slurry delivery system and leverage it as a tool to optimize filtration and other process conditions.

AccuSizer Mini FX System

0.65 to 20 µm, with a capacity of up to 10⁶ particles/mL

Optimal for ceria CMP slurries

Utilizes a single-stage dilution fluidics system

AccuSizer Mini LE System

Range: 0.5 to 400 µm, up to 9,000 particles/mL

Ideal for silica CMP slurries

Single or dual-stage dilution fluidics

AccuSizer Mini FLEX System

Choose between LE or FX sensors

Well-suited for various sample types

Utilizes dynamic single-stage dilution fluidics

AccuSizer Mini FX-Nano System

Range: 0.15 to 10 µm, with a capacity of up to 10⁶ particles/mL

Well-suited for clean, colloidal CMP slurries

Utilizes exponential dilution fluidics