A Schottky FE-Scanning Electron Microscope: The SU7000

The SU7000 from Hitachi is the ultimate all-rounder when it comes to high performance since it is equipped with an ultra high resolution Schottky FESEM that provides powerful analysis and nanoscale imaging.

(1) Upper detector (UD): microstructure, potential contrasts; (2) Middle detector (MD): high resolution material contrast; (3) Lower (chamber) detector (LD): topography. Image Credit: Hitachi High-Tech Europe

Advanced Imaging and Analysis Combined

Users can image and analyze any type of sample easily using the field-free optics and variable pressure operation

Sub-nanometer resolution is provided even below 1 kV

6@6: six signals, as well as EDS, can be observed at the same time at 6 mm working distance

Flexible Handling of Samples

Quick sample exchange via either the front door, load lock, or exchange chamber

Substages can be added in-situ for dynamic experiments

Users can easily and safely navigate their sample with the help of the combined color NaviCam

Clean and Flexible Vacuum System

Change to variable pressure at any time with just a single click

Users can keep both system and samples as clean as possible by adding a UV or plasma cleaner or by using the dry vacuum system

No limitation in the field of view or probe current when shifting to variable pressure

Future Proof

Built for quick and detailedanalysis with single or several WDS, EBSD, and EDS detectors

Add CLfor more information from pharmaceuticals, photonics, or minerals

21 accessory ports provide excellent expandability

Image sensitive or hydrated samples with the help of Hitachi’s patented Ionic Liquid or cryo stage