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A-523: Fast 3-DOF Z-Tip-Tilt Module for Alignment Automation
Physik Instrumente’s A-523 is an air-bearing Z tip/tilt stage with direct drive. It is built as a parallel-kinematic multi-axis system and can be employed for Z and tip/tilt motion. This stage provides ultra-precision in miniature format. Integrating the noncontact elements leads to a frictionless motion platform that offers the best quality, performance, and lifetime.
A-523.25005B3, dimensions in mm. Image Credit: PI (Physik Instrumente) LP
When ordering the A-523 with the A-81× or A-82× series controller, PI performs the configuration and cabling of the Z stage with applied servo tuning optimization and under applied load. Users receive a complete andreadily usable positioning system.
Features:
Travel range in Z to ±2.5 mm
Load capacity to 8 kg
Rotation range in θX, θY, to ±1°
Overall height 60 mm
Platform diameter 250 mm
Accessories and Options
Built-in vacuum clamping mechanism
Air filter sets
Application Fields
The Z tip/tilt stage is best suited for high-accuracy applications, such as fiber positioning, wafer inspection, flat screen inspection, optics positioning, maskless lithography, and ultra-LED manufacturing. The non-contact design is best suited for cleanroom applications.
Specifications
Source: PI (Physik Instrumente) LP
| Motion | A-523.25005B3 | Tolerance |
|---|---|---|
| Active axes | Z θX θY | |
| Travel range in Z | 5 mm | |
| Rotation range in θX | 2 ° | |
| Rotation range in θY | 1.6 ° | |
| Acceleration in Z, unloaded | 10 m/s² | max. |
| Maximum velocity in Z, unloaded | 200 mm/s | |
| Yaw (Rotational crosstalk in θX with motion in Z) | ± 25 µrad | typ. |
| Pitch (Rotational crosstalk in θY with motion in Z) | ± 25 µrad | typ. |
| Positioning | A-523.25005B3 | Tolerance |
| Bidirectional repeatability in Z | ± 0.25 µm | typ. |
| Bidirectional repeatability in θX | ± 8 µrad | typ. |
| Bidirectional repeatability in θY | ± 8 µrad | typ. |
| Positioning accuracy in Z, calibrated | ± 0.5 µm | typ. |
| Positioning accuracy in θX, uncalibrated | ± 15 µrad | typ. |
| Positioning accuracy in θY, uncalibrated | ± 15 µrad | typ. |
| Minimum incremental motion in Z | 0.01 µm | typ. |
| Minimum incremental motion in θX | 0.06 µrad | typ. |
| Minimum incremental motion in θY | 0.06 µrad | typ. |
| Integrated sensor | Absolute linear encoder | |
| Sensor signal | BiSS-C | |
| Sensor resolution | 1 nm | |
| Drive Properties | A-523.25005B3 | Tolerance |
| Drive type | Ironless 3-phase linear motor | |
| Nominal voltage | 24 V | |
| Peak voltage | 60 V | |
| Nominal current, RMS | 1.4 A | typ. |
| Peak current, RMS | 2.8 A | typ. |
| Force constant | 5.9 N/A | |
| Resistance phase-phase | 5.2 Ω | typ. |
| Inductance phase-phase | 1 mH | |
| Back EMF phase-phase | 4.2 V·s/m | max. |
| Pole pitch N-N | 19.66 mm | |
| Mechanical Properties | A-523.25005B3 | Tolerance |
| Guide | Air bearing guide with air preload | |
| Permissible push force in Z | 80 N | max. |
| Overall mass | 8200 g | |
| Material | Hardcoat aluminum, stainless steel mounting hardware | |
| Miscellaneous | A-523.25005B3 | Tolerance |
| Connector | HD D-sub 26 (m) | |
| Air bearing connection | Plug connection for hose with 6 mm outer diameter | |
| Operatingpressure | 515 to 585 (75 to 85 psi) kPa | |
| Air consumption | 84 L/min | max. |
| Air quality | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | |
| Recommended controllers / drivers |
A-814 (four axes), A-82x (4 / 6 / 8 axes) |
|
| Operating temperature range | +15 to +25 °C |
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